真空插板阀是通过电磁换向阀改变气路方向，控制执行气缸驱动阀板作上下运动，达到阀门的开启或关闭目的，用于接通或切断真空管路中的气流。适用介质为纯净空气或非腐蚀性气体。带信号反馈装置。可带水冷。
Valves handle applications in semiconductorand other processing, and are used most often to isolate pumps and sample entrylocks from HV or UHV work chambers.
Features
1、CF Flanged (with Copper Gasket): Operate in the atmosphere to 10-11 torr pressure range,bakeable up to 200° C (with actuator removed)
2、General purposeElectropolished Stainless Steel
3、Vacuum brazed at1,100° C to ensure reliable operation at HV and UHV pressures
4、Provide highconductance within a compact design
5、Shock-free operationwith minimum vibration
6、100,000-cycleservice before requiring maintenance
7、Available in manualor pneumatic operation
8、Pneumatic valvesclose or remain closed in the event of power loss or loss of air pressure
9、All Pneumatic1.5" flange O.D. and larger models incorporate magnetic REED switches forposition indication
10、Pneumatic valvesfeature a 120VAC solenoid operator at no extra charge (other voltages, both ACand DC, available on request)
NOTE:
1、For ease ofmaintenance, the carriage assembly can be removed from the body withoutrequiring removal of the valve from the system. Please contact us for optionssuch as roughing ports or valves that remain open in the event of powerfailure.
2、Actuator on SG0063MCCF cannotbe removed without breaking vacuum.
Specifications Table
Pressure Range(torr) | 1 x 10-11 to 760 |
Differential Press (torr) | 760 eitherdirection |
Max ΔPress Before Open (torr) | 20 |
Material | Body:Electropolished 304 stainless steel Gate: Electropolished 304 stainless steel Bellows: AM-350 Seals: Fluorocarbon o-ring |
Dimensional Drawings
Flange Size | Port ID | Max Conductance (L/Sec.) | Dim A | Dim B | Dim C | Thread | Weight (lbs.) |
1-1/3" CF | 0.625" | 10 | 1.56 | 1.31 | 4.19 | 8-32 | 3 |
1-1/3" CF | 0.625" | 10 | 1.56 | 1.31 | 4.19 | M4 | 3 |
2-3/4" CF | 1.50" | 130 | 2.03 | 2.46 | 8.30 | 1/4-28 | 10 |
2-3/4" CF | 1.50" | 130 | 2.03 | 2.46 | 8.30 | M6 | 10 |
3-3/8" CF | 2" | 270 | 2.28 | 2.96 | 9.21 | 5/16-24 | 13 |
3-3/8" CF | 2" | 270 | 2.28 | 2.96 | 9.21 | M8 | 13 |
4-1/2" CF | 2.5" | 500 | 2.41 | 3.52 | 10.12 | 5/16-24 | 18 |
4-1/2" CF | 2.5" | 500 | 2.41 | 3.52 | 10.12 | M8 | 18 |
4-5/8" CF | 3" | 800 | 2.53 | 4.28 | 11.33 | 5/16-24 | 22 |
4-5/8" CF | 3" | 800 | 2.53 | 4.28 | 11.33 | M8 | 22 |
6" CF | 4" | 1,700 | 2.97 | 5.65 | 18.67 | 5/16-24 | 33 |
6" CF | 4" | 1,700 | 2.97 | 5.65 | 18.67 | M8 | 33 |
8" CF | 6" | 5,200 | 3.17 | 7.55 | 21.99 | 5/16-24 | 50 |
8" CF | 6" | 5,200 | 3.17 | 7.55 | 21.99 | M8 | 50 |
10" CF | 8" | 12,000 | 3.35 | 10.02 | 26.34 | 5/16-24 | 75 |
10" CF | 8" | 12,000 | 3.35 | 10.02 | 26.34 | M8 | 75 |
12" CF | 10" | 21,500 | 3.89 | 12.00 | 36.80 | 5/16-24 | 147 |
12" CF | 10" | 21,500 | 3.89 | 12.00 | 36.80 | M8 | 147 |
13-1/4" CF | 10.75" | 25,000 | 3.89 | 13.08 | 39.28 | 3/8-24 | 160 |
13-1/4" CF | 10.75" | 25,000 | 3.89 | 13.08 | 39.28 | M10 | 160 |
14" CF | 12" | 34,900 | 3.89 | 14.24 | 41.53 | 3/8-24 | 170 |
14" CF | 12" | 34,900 | 3.89 | 14.24 | 41.53 | M10 | 170 |
